OTL-PECVD-1200-1400-1200 uku zafin jiki yankin PECVD tsarin, wanda ya kunshi uku sliding rod irin injin bututun tandu, Quartz injin dakin, RF ikon samar da, GX gas samar da tsarin, pumping tsarin, injin auna tsarin, lantarki ja inji.

Babban fasali:

1, ta hanyar samar da wutar lantarki na RF don juya gas a cikin dakin inji na quartz zuwa yanayin ion.

PECVD yana da ƙananan zafin jiki da ake buƙata fiye da CVD na yau da kullun don yin ajiyar gas na sinadarai

3. Za a iya sarrafa girman damuwa na fim da aka ajiye ta hanyar mitar samar da ikon RF

4, PECVD ne mafi girma, daidaito ne mafi kyau, daidaito da kwanciyar hankali fiye da na yau da kullun CVD.

5. Ana amfani da shi sosai a cikin: girma na nau'ikan fina-finai, kamar: SiOx, SiNx, SiOxNy da amorphous silicon (a-Si: H) da sauransu.

Wannan PECVD tsarin yankin zafin jiki guda uku shine tsarin PECVD wanda zai iya dumama da sauri kuma ya sanyaya, shi yana shigar da nau'i biyu na lantarki na lantarki a cikin tandun bututu uku, ana iya amfani da tsarin lantarki na lantarki. Matsakaicin dumama da sanyaya ya kai 100 ° C / min. Don samun mafi sauri dumama, za a iya pre dumama murhu zuwa saitin zafin jiki, sa'an nan kuma motsa murhu zuwa samfurin bitKa sanya. Don samun mafi saurin sanyaya, za a iya motsa murhun zuwa wani ƙarshe bayan dumama samfurin. Ana iya samun zafi da sanyaya a cikin inji ko yanayin gas mai mahimmanci10 ° C / s, shi ne low kudin sauri dumama, sanyaya biyu zafin jiki yankin PECVD tsarin.

Wannan 3 zafin jiki yankin PECVD tsarin da Swedish Kanthal juriya waya da kuma silicon carbon sanduna a matsayin dumama abubuwa, amfani da biyu layered gudanarwa tsari da kuma 30 sassa na shirin zafin jiki sarrafawa ma'auni, shift lokaci trigger, sarrafa silicon sarrafawa, murya amfani da Japan shigo da aluminum oxide polycrystalline fiber kayan, murya bututun amfani da bakin karfe flange hatimi a biyu ƙarshen, bakin karfe flange shigar da iska bakin, bawulDa matsin lamba mita, inji madadin iya kai 10-3 Pa lokacin famfo inji, raba biyu zafin jiki yankuna, biyu zafin jiki yankuna za a iya sarrafawa da kansa, saita daban-daban zafin jiki, sauki don amfani, aiki mai sauki, da murhu yana da zafin jiki filin daidaitawa, surface zafin jiki low, sanyaya zafin jiki kudi da sauri, makamashi ceton da sauran amfani, shi ne jami'o'i, kimiyya cibiyoyin bincike, masana'antu ma'adinai kamfanoni yi high za Ideal kayayyaki don nodes, girma graphene, girma daban-daban fina-finai.

(1), karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen karshen kar

（2), m sanyi karshen tsawon ne 210mm, general masana'antun amfani da 180mm, sanyi karshen dogon murhu saman zafin jiki low.

(3), Silicon carbon sanduna surface oxidation non-crystalline film m, iya kwatanta mafi kyau kare carbon sanduna.

Lokacin da kewaye overloaded ko leakage, da komai bude ta atomatik yanke

The yanayi bututun murhuMaiEquipped da sadarwa dubawa da software, za a iya sarrafa daban-daban sigogi na tandu kai tsaye ta hanyar kwamfuta, kuma za a iya lura da aikin PV da SV zafin jiki darajar da ma'auni a kan tandu daga kwamfuta, ainihin dumama curve na tandu kwamfuta zai zana a ainihin lokacin, kuma za a iya ajiye kowane lokaci zafin jiki data, a kowane lokaci za a iya kira fita

(1), ingancin high tsabtace aluminum oxide polycrystalline fiber karfafa furnace na injin suci gyara.
(2), Amfani da fasahar Japan don tsarawa.
(3), kayan murya low zafi karfin aiki, zafi gudanarwa coefficient low, saboda haka zafi rage, mai kyau insulation, high reflectivity. Heatfield daidaitawa.
(4), aluminum oxide waya mai tsayi, tsayayya da zafin jiki, tsayayya da zafi da ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin
(5), murya farfajiyar tsabta, ba sauki kashe foda.

(Duk shigo da kayan aiki ta hanyar UL takardar shaida)